Semiconductor
| Mon 11 May 2026
Beijing, May 12 -- Tokyo Electron; Fujikin has submitted a patent application for Valve and Leak Detection Method. Hayashida Takahiro, Yoshida Toshihide, Yakushijin Tadayuki, Ishibashi Keisuke, Aijima Masaya, Uchida Mitsuhiro, Nakata Tomohiro, Watanabe Kazunari, Tanno Ryutaro and Suzuki Yuya developed the invention.
The paten..