Semiconductor
| Thu 11 Jun 2026
Beijing, June 11 -- Tuojing Technology, Shanghai has submitted a patent application for Semiconductor Gas Path Valve Group System and Film Preparation Method. This invention was developed by Lu Xilong, Dong Wenhui, He Jichao, Liu Zhen, Wu Fengli, Sun Qiang, Lee Do-kang, Liu Runzhe, Zhang Qiang, Xue Guobiao, Wang Siqi and Feng Ji..