Semiconductor
| Fri 26 Jun 2026
Taipei, June 27 -- Taiwan Patent Office has awarded a patent to SK Enpulse Co Ltd and Solmics Co Ltd for Focus Ring and Apparatus of Plasma Etching Comprising the Same. Min Kyung-yeol, Hwang Sung-sic, Choi Yongsoo, Choi Yong-soo, Min Kyungyeol, Kim Kyungin, Hwang Sungsic, Kang Jung-kun, Chae Su-man, Kang Jungkun, Chae Su Man and..