Semiconductor
| Tue 04 Aug 2026
Alexandria, Aug. 5 -- Lam Res Corp and Lam Research have obtained a patent for control of mask CD. This invention was developed by Chen Chen, Ozel Taner, Xu Qing, Wong Merrett, Jiang Beibei, Pi Shuang, Agarwal Daksh and Mukhopadhyay Amit.
The patent application number is US202218011477 20220225. The patent publication number ..