Semiconductor
| Thu 13 Aug 2026
Beijing, Aug. 13 -- Guangke Xintu Beijing Tech Co Ltd has filed a patent application for Focus Detection and Focusing Leveling Device and Method for Holographic Lithography. This invention was developed by Zhang Yu, Xu Xingran, Zhang Zhengang, Yang Zhen, Fu Junlong, Li Shuo, Cheng Zhi, Qin Hongpeng, Zhang Xiaofang, Zhang Lili, P..