Semiconductor
| Fri 24 Apr 2026
Alexandria, April 25 -- TDK has been granted a patent for Substrate Processing Apparatus. Sato Yohei, Koizumi Hiroshi, Miyagoshi Toshinobu, Shindo Osamu, Sunaga Seijiro, Makida Mitsuyoshi, Yamashita Makoto, Kato Yasuo, Shindo Ryo and Matsumoto Masashi developed the invention.
The patent application number is US202318323745 20..