Semiconductor
| Thu 29 Jan 2026
Beijing, Jan. 29 -- Samsung Electronics has filed a patent application for Substrate Processing Apparatus and Substrate Processing Method. This invention was developed by Lee Jun-ho, Noh Sung-jun, Jeong Ji-hoon, Kang Song Yun, Kim Tae Heon, Kim Young-hoo, Yun Jun Ho, Lee Jong-won, Zheng Zhixiong and Hong Tinghe.
The patent appl..