Semiconductor
| Mon 21 Sep 2026
Geneva, Sept. 21 -- Lam Research has applied WIPO patent for Void-free Carbon Gapfill. Puthenkovilakam Ragesh, Reddy Kapu Sirish, Subramanian Ashwanth, Maliekkal Vineet, Dodhia Aarsh Nilesh, Patel Roshan Ashokbhai, Ramanan Vinayak, Hu Yiming and Zhang Pengyi developed it.
The patent application number is WO2026US17161 20260227...