Semiconductor
| Tue 23 Dec 2025
Geneva, Dec. 24 -- Wonik IPS has applied WIPO patent for Substrate Processing Apparatus. Woo Hyun Jong, Lee Yu Kyung, Kim Tae Sik, Yi Hyun Gyun, Kum Dae Sub, Kim Young Woo, Kim Chan Yeon and Park Sang Rok developed it.
The patent application number is WO2024KR18591 20241122. The patent publication number is WO2025258759 (A1). I..