Semiconductor
| Mon 30 Mar 2026
Geneva, March 31 -- Lam Research has submitted a patent application for Selective Etch with Passivation Tuning. Veber Gregory Clinton, Wong Merrett, Xu Qing, Ozel Taner, Jiang Nanke, Gopaladasu Prabhakara, Martirosyan Vahagn and Jiang Yiran developed the invention.
The patent application number is WO2025US43229 20250822. The pa..