Semiconductor
| Sun 24 May 2026
Alexandria, May 25 -- Tokyo Electron has submitted a patent application for Liquid Processing Apparatus. Kim Junghyun, Muta Koshi, Takahashi Daiki, Kawakami Kohei, Shimmura Satoshi, Shibasaki Kenta, Ueyama Shota and Miyamoto Tetsushi developed the invention.
The patent application number is US202619446258 20260112. The patent p..