Semiconductor
| Fri 13 Feb 2026
Beijing, Feb. 14 -- Tokyo Electron has submitted a patent application for Substrate Processing Method and Substrate Processing System. This invention was developed by Ono Kenta, Fujimoto Seiji, Okada Soichiro, Hara Arisa, Sakagami Takuya, Nakane Yuta, Kumakura Sho, Nishizuka Tetsuya and Honda Masanobu.
The patent application nu..