Semiconductor
| Thu 04 Jun 2026
Geneva, June 5 -- Tokyo Electron has applied WIPO patent for Substrate Processing System and Adjustment Method. Hatanaka Takayuki, Ohtani Ryuji, Kondo Shunto, Osada Genki, Takada Gakuto, Makabe Toshiyuki, Kimura Makoto, Yokoyama Kimihiro, Taniguchi Yuta, Masui Akihiro and Saito Ryosuke developed it.
The patent application numbe..