Semiconductor
| Wed 12 Aug 2026
Geneva, Aug. 12 -- Tokyo Electron has sought patent for Wafer-type Sensor, Measurement Method, and Measurement Device. This invention was developed by Hatanaka Takayuki, Kondo Shunto, Yokoyama Kimihiro, Ukai Tomofumi, Oyamada Tetsu and Wu Tong.
The patent application number is WO2026JP01464 20260119. The patent publication numb..