Semiconductor
| Thu 06 Nov 2025
Beijing, Nov. 6 -- Tokyo Electron has sought patent for Liquid Processing Apparatus and Monitoring Method. This invention was developed by Mizushino Shinichi, Into Shunsuke, Yuichiro Kumumoto, Toyozawa Toshihiro, Ishimaru Daisuke, Matsutake Yuki, Iida Shigeyuki and Hayama Takafumi.
The patent application number is CN20241130088..