Semiconductor
| Wed 08 Jul 2026
Beijing, July 8 -- Shenyang Heyan Tech Co Ltd has filed a patent application for Jet Flow Calibration Device and Method, Semiconductor Processing Equipment, Storage Medium and Processor. This invention was developed by Han Yingyan, Hou Ying, Qi Xiaodong, Yuan Huizhu, Wu Hongbai, Li Zhipeng, Xu Peng and Li Wenlong.
The patent ..