Semiconductor
| Fri 05 Jun 2026
Alexandria, June 6 -- Lam Research has secured a patent on Metal Etch. Fan Yiwen, Yang Wenbing, Lin Ran, Tan Samantha Siamhwa, Weidman Timothy William and Mukherjee Tamal developed the invention.
The patent application number is US202118257085 20211206. The patent publication number is US12648381 (B2). International Patent Clas..