Taipei, April 24 -- Lam Research has been awarded a patent for detection system for tunable/replaceable edge coupling ring. This invention was developed by Mcchesney Jon, Wang Yuhou, Genetti Damon Tyrone and Paterson Alexander. The patent application number is TW20220144724 20180528. The patent publication number is TWI860581 (..

Taipei, April 24 -- Lam Research has secured a patent on modular-component system for gas delivery. Stumpf John Folden, Long Damien, Nakashima Norman and Leeser Karl Frederick developed the invention. The patent application number is TW20200112670 20200415. The patent publication number is TWI860346 (B). International Patent Cl..

Taipei, April 24 -- Lam Research has secured a patent on split chamber assembly. Antolik Jerrel Kent developed the invention. The patent application number is TW20190148355 20191230. The patent publication number is TWI860318 (B). International Patent Classification codes are H01J37/32 and H01L21/67. Cooperative Patent Classifi..

Taipei, April 24 -- Lam Research has received a patent for substrate processing system and method therefor. This invention was developed by Han Hui Ling and Ramachandran Seetharaman. The patent application number is TW20200109974 20200325. The patent publication number is TWI861079 (B). International Patent Classification codes..

Taipei, April 24 -- Lam Research has been granted a patent for electrostatic chuck with ceramic monolithic body. Wang Feng, Gaff Keith, Kimball Christopher and Ehrlich Darrell developed the invention. The patent application number is TW20200104140 20200211. The patent publication number is TWI861055 (B). International Patent Cl..

Taipei, April 24 -- Taiwan Patent for substrate processing systems has been issued to Lam Research. This invention was developed by Long Maolin, Rastgar Neema and Paterson Alexander Miller. The patent application number is TW20190148308 20191230. The patent publication number is TWI861041 (B). International Patent Classificatio..

Taipei, April 24 -- Lam Research has obtained a patent for identification of and compensation for a failure in a heater array. This invention was developed by Jing Changyou. The patent application number is TW20190138753 20191028. The patent publication number is TWI861022 (B). International Patent Classification codes are H01J..

Seoul, April 24 -- Korean Intellectual Property Office has published Lam Research patent application for substrate supports with mesochannel assemblies. The invention was developed by Subramanya Spoorthi, Revanna Shivakumara, Flynn Kevin, Gandur Balagangadhara Chandrashekara Kaushik, Jain Muskaan and Krishna Murthy Santosh Kumar..

Taipei, April 24 -- Taiwan Patent Office has awarded a patent to Lam Research for combiner and distributor for adjusting impedances or power across multiple plasma processing stations. Kapoor Sunil, Thomas George, Rangineni Yaswanth and Augustyniak Edward developed the invention. The patent application number is TW20230144890 2..

Taipei, April 23 -- Lam Research has been awarded a patent for consumable part for plasma processing chamber, method for building engineered surface of consumable part, and plasma processing chamber. This invention was developed by Peng Gordon Wen-yin, Radocea Adrian, Jiang Yu, Rajagopalan Mansa and Londono Nicolas. The patent ..

Seoul, April 23 -- Korean Intellectual Property Office has published Lam Research patent application for moveable edge rings with reduced capacitance variation for substrate processing systems. The invention was developed by Kimball Christopher, Mopidevi Hema Swaroop, Sriraman Saravanapriyan, Kamp Tom A, Ehrlich Darrell, Contrer..

Taipei, April 23 -- Taiwan Patent Office has awarded a patent to Lam Research for controlling plating electrolyte concentration on an electrochemical plating apparatus. He Zhian, Ghongadi Shantinath, Ma Quan, Hur Hyungjun, Sweeney Cian, Nguyen Quang, Karim Rezaul and Feng Jingbin developed the invention. The patent application ..

Taipei, April 23 -- Lam Research has been granted a patent for control system and substrate processing system. Linebarger Jr Nick Ray, Bailey Curtis W, Srinivasan Easwar and Pelkey Devon developed the invention. The patent application number is TW20190127728 20190805. The patent publication number is TWI859153 (B). Internationa..

Taipei, April 23 -- Lam Research has been granted a patent for wide lipseal for electroplating. This invention was developed by Thorkelsson Kari, Berke Aaron, Kumar Santosh, Rash Robert, Chua Lee Peng and Buckalew Bryan. The patent application number is TW20240103272 20180227. The patent publication number is TWI859060 (B). Int..

Seoul, April 21 -- Lam Research has submitted a patent application for fault detection using showerhead voltage variation. This invention was developed by Kapoor Sunil, Rangineni Yaswanth, Bingham Aaron and Nguyen Tuan. The patent application number is KR20240029334 20240229. The patent publication number is KR20240032790 (A). ..

Seoul, April 21 -- Lam Research has submitted a patent application for rework of metal-containing photoresist. Peter Daniel, Xue Meng, Li Da, Yu Jengyi, Tan Samantha Siamhwa and Choi Wook developed the invention. The patent application number is KR20247006713 20220720. The patent publication number is KR20240032175 (A). Interna..

Seoul, April 21 -- Lam Research has filed a patent application for multi-step post-exposure treatment to improve dry development performance of metal-containing resist. This invention was developed by Tan Samantha Siamhwa, Li Da, Yu Jengyi, Kim Ji Yeon and Pan Yang. The patent application number is KR20247006338 20220715. The p..

Seoul, April 21 -- Lam Research has applied Korean patent for plasma enhanced atomic layer deposition of silicon-containing films. Kumar Ravi, Agarwal Pulkit, Lavoie Adrien, Austin Dustin Zachary, Abel Joseph R, Agnew Douglas Walter and Baker Jonathan Grant developed it. The patent application number is KR20247004862 20220701. ..

Seoul, April 21 -- Lam Research has submitted a patent application for substrate pedestal module including backside gas delivery tube and method of making. This invention was developed by Gomm Troy Alan and Linebarger Jr Nick Ray. The patent application number is KR20240025363 20240221. The patent publication number is KR202400..

Seoul, April 21 -- Korean Intellectual Property Office has received Lam Research patent application for multi-sectional plasma confinement ring structure. Marakhtanov Alexei and Kellogg Michael C developed the invention. The patent application number is KR20237044448 20220516. The patent publication number is KR20240031964 (A)...

Seoul, April 21 -- Lam Research has applied Korean patent for increasing deposition rates of oxide films. Gupta Awnish, Pasquale Frank L, Lavoie Adrien, Bhandari Shiva Sharan, Agarwal Pulkit and Van Schravendijk Bart Jan developed it. The patent application number is KR20247005392 20220624. The patent publication number is KR20..